1/3/2011	9:31:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2011	9:31:27 AM	Recipe started at 9:31 AM
1/3/2011	9:31:27 AM	H2 valve closed
1/3/2011	9:31:27 AM	BCl3 valve closed
1/3/2011	9:31:27 AM	PH3 valve closed
1/3/2011	9:31:27 AM	SiCl4 pre valve closed
1/3/2011	9:31:27 AM	SiCl4 post valve closed
1/3/2011	9:31:27 AM	Main Vac valve closed
1/3/2011	9:31:27 AM	Bypass valve closed
1/3/2011	9:31:27 AM	Bubbler valve closed
1/3/2011	9:31:27 AM	Helium valve opened
1/3/2011	9:31:27 AM	Helium MFC set to  500.000000
1/3/2011	9:31:27 AM	H2 MFC set to  0.000000
1/3/2011	9:31:27 AM	BCl3 MFC set to  0.000000
1/3/2011	9:31:27 AM	PHl3 MFC set to  0.000000
1/3/2011	9:31:27 AM	SiCl4 MFC set to  0.000000
1/3/2011	9:31:27 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	9:31:27 AM	Tube furnace set to 0
1/3/2011	9:32:48 AM	Helium valve closed
1/3/2011	9:32:48 AM	H2 valve closed
1/3/2011	9:32:48 AM	BCl3 valve closed
1/3/2011	9:32:48 AM	PH3 valve closed
1/3/2011	9:32:48 AM	SiCl4 pre valve closed
1/3/2011	9:32:48 AM	SiCl4 post valve closed
1/3/2011	9:32:48 AM	Main Vac valve closed
1/3/2011	9:32:48 AM	Bypass valve closed
1/3/2011	9:32:48 AM	Bubbler valve closed
1/3/2011	9:32:48 AM	Helium MFC set to  0.000000
1/3/2011	9:32:48 AM	H2 MFC set to  0.000000
1/3/2011	9:32:48 AM	BCl3 MFC set to  0.000000
1/3/2011	9:32:48 AM	PHl3 MFC set to  0.000000
1/3/2011	9:32:48 AM	SiCl4 MFC set to  0.000000
1/3/2011	9:32:48 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	9:32:48 AM	Tube furnace set to 0
1/3/2011	9:32:49 AM	Run finished at 9:32 AM
1/3/2011	9:32:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2011	9:35:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2011	9:35:12 AM	Recipe started at 9:35 AM
1/3/2011	9:35:12 AM	Helium valve closed
1/3/2011	9:35:12 AM	H2 valve closed
1/3/2011	9:35:12 AM	BCl3 valve closed
1/3/2011	9:35:12 AM	PH3 valve closed
1/3/2011	9:35:12 AM	SiCl4 pre valve closed
1/3/2011	9:35:12 AM	SiCl4 post valve closed
1/3/2011	9:35:12 AM	Main Vac valve closed
1/3/2011	9:35:12 AM	Bubbler valve closed
1/3/2011	9:35:12 AM	Bypass valve opened
1/3/2011	9:35:12 AM	Helium MFC set to  0.000000
1/3/2011	9:35:12 AM	H2 MFC set to  0.000000
1/3/2011	9:35:12 AM	BCl3 MFC set to  0.000000
1/3/2011	9:35:12 AM	PHl3 MFC set to  0.000000
1/3/2011	9:35:12 AM	SiCl4 MFC set to  0.000000
1/3/2011	9:35:12 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	9:35:12 AM	Tube furnace set to 0
1/3/2011	9:36:09 AM	Helium valve closed
1/3/2011	9:36:09 AM	H2 valve closed
1/3/2011	9:36:09 AM	BCl3 valve closed
1/3/2011	9:36:09 AM	PH3 valve closed
1/3/2011	9:36:09 AM	SiCl4 pre valve closed
1/3/2011	9:36:09 AM	SiCl4 post valve closed
1/3/2011	9:36:09 AM	Bubbler valve closed
1/3/2011	9:36:09 AM	Main Vac valve opened
1/3/2011	9:36:09 AM	Bypass valve opened
1/3/2011	9:36:09 AM	Helium MFC set to  0.000000
1/3/2011	9:36:09 AM	H2 MFC set to  0.000000
1/3/2011	9:36:09 AM	BCl3 MFC set to  0.000000
1/3/2011	9:36:09 AM	PHl3 MFC set to  0.000000
1/3/2011	9:36:09 AM	SiCl4 MFC set to  0.000000
1/3/2011	9:36:09 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	9:36:10 AM	Tube furnace set to 0
1/3/2011	9:36:10 AM	Run finished at 9:36 AM
1/3/2011	9:36:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2011	9:36:20 AM	Helium MFC set to  10.000000
1/3/2011	9:36:21 AM	Helium valve opened
1/3/2011	10:12:41 AM	Helium valve closed
1/3/2011	10:13:31 AM	Recipe started at 10:13 AM
1/3/2011	10:13:31 AM	Helium valve closed
1/3/2011	10:13:31 AM	BCl3 valve closed
1/3/2011	10:13:31 AM	PH3 valve closed
1/3/2011	10:13:31 AM	SiCl4 pre valve closed
1/3/2011	10:13:31 AM	SiCl4 post valve closed
1/3/2011	10:13:31 AM	Main Vac valve closed
1/3/2011	10:13:31 AM	Bypass valve closed
1/3/2011	10:13:31 AM	Bubbler valve closed
1/3/2011	10:13:31 AM	H2 valve opened
1/3/2011	10:13:31 AM	Helium MFC set to  0.000000
1/3/2011	10:13:31 AM	H2 MFC set to  500.000000
1/3/2011	10:13:31 AM	BCl3 MFC set to  0.000000
1/3/2011	10:13:31 AM	PHl3 MFC set to  0.000000
1/3/2011	10:13:31 AM	SiCl4 MFC set to  0.000000
1/3/2011	10:13:31 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:13:31 AM	Tube furnace set to 100
1/3/2011	10:14:54 AM	Helium valve closed
1/3/2011	10:14:54 AM	BCl3 valve closed
1/3/2011	10:14:54 AM	PH3 valve closed
1/3/2011	10:14:54 AM	SiCl4 pre valve closed
1/3/2011	10:14:54 AM	SiCl4 post valve closed
1/3/2011	10:14:54 AM	Main Vac valve closed
1/3/2011	10:14:54 AM	Bypass valve closed
1/3/2011	10:14:54 AM	H2 valve opened
1/3/2011	10:14:54 AM	Bubbler valve opened
1/3/2011	10:14:54 AM	Helium MFC set to  0.000000
1/3/2011	10:14:54 AM	H2 MFC set to  500.000000
1/3/2011	10:14:54 AM	BCl3 MFC set to  0.000000
1/3/2011	10:14:54 AM	PHl3 MFC set to  0.000000
1/3/2011	10:14:54 AM	SiCl4 MFC set to  0.000000
1/3/2011	10:14:54 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:14:54 AM	Tube furnace set to 1000
1/3/2011	10:34:54 AM	Helium valve closed
1/3/2011	10:34:54 AM	BCl3 valve closed
1/3/2011	10:34:54 AM	PH3 valve closed
1/3/2011	10:34:54 AM	Main Vac valve closed
1/3/2011	10:34:54 AM	Bypass valve closed
1/3/2011	10:34:54 AM	H2 valve opened
1/3/2011	10:34:54 AM	SiCl4 pre valve opened
1/3/2011	10:34:54 AM	SiCl4 post valve opened
1/3/2011	10:34:54 AM	Bubbler valve opened
1/3/2011	10:34:54 AM	Helium MFC set to  0.000000
1/3/2011	10:34:54 AM	H2 MFC set to  500.000000
1/3/2011	10:34:54 AM	BCl3 MFC set to  0.000000
1/3/2011	10:34:54 AM	PHl3 MFC set to  0.000000
1/3/2011	10:34:54 AM	SiCl4 MFC set to  50.000000
1/3/2011	10:34:54 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:34:55 AM	Tube furnace set to 1000
1/3/2011	10:54:55 AM	H2 valve closed
1/3/2011	10:54:55 AM	BCl3 valve closed
1/3/2011	10:54:55 AM	PH3 valve closed
1/3/2011	10:54:55 AM	SiCl4 pre valve closed
1/3/2011	10:54:55 AM	SiCl4 post valve closed
1/3/2011	10:54:55 AM	Main Vac valve closed
1/3/2011	10:54:55 AM	Bypass valve closed
1/3/2011	10:54:55 AM	Helium valve opened
1/3/2011	10:54:55 AM	Bubbler valve opened
1/3/2011	10:54:55 AM	Helium MFC set to  500.000000
1/3/2011	10:54:55 AM	H2 MFC set to  0.000000
1/3/2011	10:54:55 AM	BCl3 MFC set to  0.000000
1/3/2011	10:54:55 AM	PHl3 MFC set to  0.000000
1/3/2011	10:54:55 AM	SiCl4 MFC set to  0.000000
1/3/2011	10:54:55 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:54:55 AM	Tube furnace set to 0
1/3/2011	11:44:55 AM	Helium valve closed
1/3/2011	11:44:55 AM	H2 valve closed
1/3/2011	11:44:55 AM	BCl3 valve closed
1/3/2011	11:44:55 AM	PH3 valve closed
1/3/2011	11:44:55 AM	SiCl4 pre valve closed
1/3/2011	11:44:55 AM	SiCl4 post valve closed
1/3/2011	11:44:55 AM	Main Vac valve closed
1/3/2011	11:44:55 AM	Bypass valve closed
1/3/2011	11:44:55 AM	Bubbler valve closed
1/3/2011	11:44:55 AM	Helium MFC set to  0.000000
1/3/2011	11:44:55 AM	H2 MFC set to  0.000000
1/3/2011	11:44:55 AM	BCl3 MFC set to  0.000000
1/3/2011	11:44:55 AM	PHl3 MFC set to  0.000000
1/3/2011	11:44:55 AM	SiCl4 MFC set to  0.000000
1/3/2011	11:44:55 AM	Bypass solenoid MFC set to  0.000000
1/3/2011	11:44:55 AM	Tube furnace set to 0
1/3/2011	11:44:55 AM	Run finished at 11:44 AM
1/3/2011	12:40:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2011	12:40:55 PM	Recipe started at 12:40 PM
1/3/2011	12:40:55 PM	Helium valve closed
1/3/2011	12:40:55 PM	H2 valve closed
1/3/2011	12:40:55 PM	BCl3 valve closed
1/3/2011	12:40:55 PM	PH3 valve closed
1/3/2011	12:40:55 PM	SiCl4 pre valve closed
1/3/2011	12:40:55 PM	SiCl4 post valve closed
1/3/2011	12:40:55 PM	Main Vac valve closed
1/3/2011	12:40:55 PM	Bubbler valve closed
1/3/2011	12:40:55 PM	Bypass valve opened
1/3/2011	12:40:55 PM	Helium MFC set to  0.000000
1/3/2011	12:40:55 PM	H2 MFC set to  0.000000
1/3/2011	12:40:55 PM	BCl3 MFC set to  0.000000
1/3/2011	12:40:55 PM	PHl3 MFC set to  0.000000
1/3/2011	12:40:55 PM	SiCl4 MFC set to  0.000000
1/3/2011	12:40:55 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	12:40:55 PM	Tube furnace set to 0
1/3/2011	12:41:56 PM	Helium valve closed
1/3/2011	12:41:56 PM	H2 valve closed
1/3/2011	12:41:56 PM	BCl3 valve closed
1/3/2011	12:41:56 PM	PH3 valve closed
1/3/2011	12:41:56 PM	SiCl4 pre valve closed
1/3/2011	12:41:56 PM	SiCl4 post valve closed
1/3/2011	12:41:56 PM	Bubbler valve closed
1/3/2011	12:41:56 PM	Main Vac valve opened
1/3/2011	12:41:56 PM	Bypass valve opened
1/3/2011	12:41:56 PM	Helium MFC set to  0.000000
1/3/2011	12:41:56 PM	H2 MFC set to  0.000000
1/3/2011	12:41:56 PM	BCl3 MFC set to  0.000000
1/3/2011	12:41:56 PM	PHl3 MFC set to  0.000000
1/3/2011	12:41:56 PM	SiCl4 MFC set to  0.000000
1/3/2011	12:41:56 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	12:41:57 PM	Tube furnace set to 0
1/3/2011	12:41:57 PM	Run finished at 12:41 PM
1/3/2011	12:41:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2011	12:43:13 PM	Helium MFC set to  20.000000
1/3/2011	12:43:14 PM	Helium valve opened
1/3/2011	1:25:05 PM	Helium valve closed
1/3/2011	1:30:33 PM	Helium valve opened
1/3/2011	1:44:21 PM	Helium valve closed
1/3/2011	1:45:21 PM	Recipe started at 1:45 PM
1/3/2011	1:45:21 PM	Helium valve closed
1/3/2011	1:45:21 PM	BCl3 valve closed
1/3/2011	1:45:21 PM	PH3 valve closed
1/3/2011	1:45:21 PM	SiCl4 pre valve closed
1/3/2011	1:45:21 PM	SiCl4 post valve closed
1/3/2011	1:45:21 PM	Main Vac valve closed
1/3/2011	1:45:21 PM	Bypass valve closed
1/3/2011	1:45:21 PM	Bubbler valve closed
1/3/2011	1:45:21 PM	H2 valve opened
1/3/2011	1:45:21 PM	Helium MFC set to  0.000000
1/3/2011	1:45:21 PM	H2 MFC set to  500.000000
1/3/2011	1:45:21 PM	BCl3 MFC set to  0.000000
1/3/2011	1:45:21 PM	PHl3 MFC set to  0.000000
1/3/2011	1:45:21 PM	SiCl4 MFC set to  0.000000
1/3/2011	1:45:21 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	1:45:21 PM	Tube furnace set to 100
1/3/2011	1:46:43 PM	Helium valve closed
1/3/2011	1:46:43 PM	BCl3 valve closed
1/3/2011	1:46:43 PM	PH3 valve closed
1/3/2011	1:46:43 PM	SiCl4 pre valve closed
1/3/2011	1:46:43 PM	SiCl4 post valve closed
1/3/2011	1:46:43 PM	Main Vac valve closed
1/3/2011	1:46:43 PM	Bypass valve closed
1/3/2011	1:46:43 PM	H2 valve opened
1/3/2011	1:46:43 PM	Bubbler valve opened
1/3/2011	1:46:43 PM	Helium MFC set to  0.000000
1/3/2011	1:46:43 PM	H2 MFC set to  500.000000
1/3/2011	1:46:43 PM	BCl3 MFC set to  0.000000
1/3/2011	1:46:43 PM	PHl3 MFC set to  0.000000
1/3/2011	1:46:43 PM	SiCl4 MFC set to  0.000000
1/3/2011	1:46:43 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	1:46:43 PM	Tube furnace set to 1000
1/3/2011	2:06:43 PM	Helium valve closed
1/3/2011	2:06:43 PM	BCl3 valve closed
1/3/2011	2:06:43 PM	PH3 valve closed
1/3/2011	2:06:43 PM	Main Vac valve closed
1/3/2011	2:06:43 PM	Bypass valve closed
1/3/2011	2:06:43 PM	H2 valve opened
1/3/2011	2:06:43 PM	SiCl4 pre valve opened
1/3/2011	2:06:43 PM	SiCl4 post valve opened
1/3/2011	2:06:43 PM	Bubbler valve opened
1/3/2011	2:06:43 PM	Helium MFC set to  0.000000
1/3/2011	2:06:43 PM	H2 MFC set to  500.000000
1/3/2011	2:06:43 PM	BCl3 MFC set to  0.000000
1/3/2011	2:06:43 PM	PHl3 MFC set to  0.000000
1/3/2011	2:06:43 PM	SiCl4 MFC set to  50.000000
1/3/2011	2:06:43 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	2:06:43 PM	Tube furnace set to 1000
1/3/2011	2:26:43 PM	H2 valve closed
1/3/2011	2:26:43 PM	BCl3 valve closed
1/3/2011	2:26:43 PM	PH3 valve closed
1/3/2011	2:26:43 PM	SiCl4 pre valve closed
1/3/2011	2:26:43 PM	SiCl4 post valve closed
1/3/2011	2:26:43 PM	Main Vac valve closed
1/3/2011	2:26:43 PM	Bypass valve closed
1/3/2011	2:26:43 PM	Helium valve opened
1/3/2011	2:26:43 PM	Bubbler valve opened
1/3/2011	2:26:43 PM	Helium MFC set to  500.000000
1/3/2011	2:26:43 PM	H2 MFC set to  0.000000
1/3/2011	2:26:43 PM	BCl3 MFC set to  0.000000
1/3/2011	2:26:43 PM	PHl3 MFC set to  0.000000
1/3/2011	2:26:43 PM	SiCl4 MFC set to  0.000000
1/3/2011	2:26:43 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	2:26:44 PM	Tube furnace set to 0
1/3/2011	3:16:44 PM	Helium valve closed
1/3/2011	3:16:44 PM	H2 valve closed
1/3/2011	3:16:44 PM	BCl3 valve closed
1/3/2011	3:16:44 PM	PH3 valve closed
1/3/2011	3:16:44 PM	SiCl4 pre valve closed
1/3/2011	3:16:44 PM	SiCl4 post valve closed
1/3/2011	3:16:44 PM	Main Vac valve closed
1/3/2011	3:16:44 PM	Bypass valve closed
1/3/2011	3:16:44 PM	Bubbler valve closed
1/3/2011	3:16:44 PM	Helium MFC set to  0.000000
1/3/2011	3:16:44 PM	H2 MFC set to  0.000000
1/3/2011	3:16:44 PM	BCl3 MFC set to  0.000000
1/3/2011	3:16:44 PM	PHl3 MFC set to  0.000000
1/3/2011	3:16:44 PM	SiCl4 MFC set to  0.000000
1/3/2011	3:16:44 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	3:16:44 PM	Tube furnace set to 0
1/3/2011	3:16:44 PM	Run finished at 3:16 PM
1/3/2011	4:22:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2011	4:22:10 PM	Recipe started at 4:22 PM
1/3/2011	4:22:10 PM	Helium valve closed
1/3/2011	4:22:10 PM	H2 valve closed
1/3/2011	4:22:10 PM	BCl3 valve closed
1/3/2011	4:22:10 PM	PH3 valve closed
1/3/2011	4:22:10 PM	SiCl4 pre valve closed
1/3/2011	4:22:10 PM	SiCl4 post valve closed
1/3/2011	4:22:10 PM	Main Vac valve closed
1/3/2011	4:22:10 PM	Bubbler valve closed
1/3/2011	4:22:10 PM	Bypass valve opened
1/3/2011	4:22:10 PM	Helium MFC set to  0.000000
1/3/2011	4:22:10 PM	H2 MFC set to  0.000000
1/3/2011	4:22:10 PM	BCl3 MFC set to  0.000000
1/3/2011	4:22:10 PM	PHl3 MFC set to  0.000000
1/3/2011	4:22:10 PM	SiCl4 MFC set to  0.000000
1/3/2011	4:22:10 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	4:22:10 PM	Tube furnace set to 0
1/3/2011	4:23:12 PM	Helium valve closed
1/3/2011	4:23:12 PM	H2 valve closed
1/3/2011	4:23:12 PM	BCl3 valve closed
1/3/2011	4:23:12 PM	PH3 valve closed
1/3/2011	4:23:12 PM	SiCl4 pre valve closed
1/3/2011	4:23:12 PM	SiCl4 post valve closed
1/3/2011	4:23:12 PM	Bubbler valve closed
1/3/2011	4:23:12 PM	Main Vac valve opened
1/3/2011	4:23:12 PM	Bypass valve opened
1/3/2011	4:23:12 PM	Helium MFC set to  0.000000
1/3/2011	4:23:12 PM	H2 MFC set to  0.000000
1/3/2011	4:23:12 PM	BCl3 MFC set to  0.000000
1/3/2011	4:23:12 PM	PHl3 MFC set to  0.000000
1/3/2011	4:23:12 PM	SiCl4 MFC set to  0.000000
1/3/2011	4:23:12 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	4:23:12 PM	Tube furnace set to 0
1/3/2011	4:23:12 PM	Run finished at 4:23 PM
1/3/2011	4:23:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2011	7:11:15 PM	Helium MFC set to  20.000000
1/3/2011	7:11:16 PM	Helium valve opened
1/3/2011	7:15:37 PM	Helium valve closed
1/3/2011	9:39:19 PM	Recipe started at 9:39 PM
1/3/2011	9:39:19 PM	Helium valve closed
1/3/2011	9:39:19 PM	BCl3 valve closed
1/3/2011	9:39:19 PM	PH3 valve closed
1/3/2011	9:39:19 PM	SiCl4 pre valve closed
1/3/2011	9:39:19 PM	SiCl4 post valve closed
1/3/2011	9:39:19 PM	Main Vac valve closed
1/3/2011	9:39:19 PM	Bypass valve closed
1/3/2011	9:39:19 PM	Bubbler valve closed
1/3/2011	9:39:19 PM	H2 valve opened
1/3/2011	9:39:19 PM	Helium MFC set to  0.000000
1/3/2011	9:39:19 PM	H2 MFC set to  500.000000
1/3/2011	9:39:19 PM	BCl3 MFC set to  0.000000
1/3/2011	9:39:19 PM	PHl3 MFC set to  0.000000
1/3/2011	9:39:19 PM	SiCl4 MFC set to  0.000000
1/3/2011	9:39:19 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	9:39:19 PM	Tube furnace set to 100
1/3/2011	9:40:42 PM	Helium valve closed
1/3/2011	9:40:42 PM	BCl3 valve closed
1/3/2011	9:40:42 PM	PH3 valve closed
1/3/2011	9:40:42 PM	SiCl4 pre valve closed
1/3/2011	9:40:42 PM	SiCl4 post valve closed
1/3/2011	9:40:42 PM	Main Vac valve closed
1/3/2011	9:40:42 PM	Bypass valve closed
1/3/2011	9:40:42 PM	H2 valve opened
1/3/2011	9:40:42 PM	Bubbler valve opened
1/3/2011	9:40:42 PM	Helium MFC set to  0.000000
1/3/2011	9:40:42 PM	H2 MFC set to  500.000000
1/3/2011	9:40:42 PM	BCl3 MFC set to  0.000000
1/3/2011	9:40:42 PM	PHl3 MFC set to  0.000000
1/3/2011	9:40:42 PM	SiCl4 MFC set to  0.000000
1/3/2011	9:40:42 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	9:40:43 PM	Tube furnace set to 1000
1/3/2011	10:00:43 PM	Helium valve closed
1/3/2011	10:00:43 PM	BCl3 valve closed
1/3/2011	10:00:43 PM	PH3 valve closed
1/3/2011	10:00:43 PM	Main Vac valve closed
1/3/2011	10:00:43 PM	Bypass valve closed
1/3/2011	10:00:43 PM	H2 valve opened
1/3/2011	10:00:43 PM	SiCl4 pre valve opened
1/3/2011	10:00:43 PM	SiCl4 post valve opened
1/3/2011	10:00:43 PM	Bubbler valve opened
1/3/2011	10:00:43 PM	Helium MFC set to  0.000000
1/3/2011	10:00:43 PM	H2 MFC set to  500.000000
1/3/2011	10:00:43 PM	BCl3 MFC set to  0.000000
1/3/2011	10:00:43 PM	PHl3 MFC set to  0.000000
1/3/2011	10:00:43 PM	SiCl4 MFC set to  50.000000
1/3/2011	10:00:43 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:00:43 PM	Tube furnace set to 1000
1/3/2011	10:20:43 PM	H2 valve closed
1/3/2011	10:20:43 PM	BCl3 valve closed
1/3/2011	10:20:43 PM	PH3 valve closed
1/3/2011	10:20:43 PM	SiCl4 pre valve closed
1/3/2011	10:20:43 PM	SiCl4 post valve closed
1/3/2011	10:20:43 PM	Main Vac valve closed
1/3/2011	10:20:43 PM	Bypass valve closed
1/3/2011	10:20:43 PM	Helium valve opened
1/3/2011	10:20:43 PM	Bubbler valve opened
1/3/2011	10:20:43 PM	Helium MFC set to  500.000000
1/3/2011	10:20:43 PM	H2 MFC set to  0.000000
1/3/2011	10:20:43 PM	BCl3 MFC set to  0.000000
1/3/2011	10:20:43 PM	PHl3 MFC set to  0.000000
1/3/2011	10:20:43 PM	SiCl4 MFC set to  0.000000
1/3/2011	10:20:43 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:20:43 PM	Tube furnace set to 0
1/3/2011	10:54:10 PM	Helium valve closed
1/3/2011	10:54:10 PM	H2 valve closed
1/3/2011	10:54:10 PM	BCl3 valve closed
1/3/2011	10:54:10 PM	PH3 valve closed
1/3/2011	10:54:10 PM	SiCl4 pre valve closed
1/3/2011	10:54:10 PM	SiCl4 post valve closed
1/3/2011	10:54:10 PM	Main Vac valve closed
1/3/2011	10:54:10 PM	Bypass valve closed
1/3/2011	10:54:10 PM	Bubbler valve closed
1/3/2011	10:54:10 PM	Helium MFC set to  0.000000
1/3/2011	10:54:10 PM	H2 MFC set to  0.000000
1/3/2011	10:54:10 PM	BCl3 MFC set to  0.000000
1/3/2011	10:54:10 PM	PHl3 MFC set to  0.000000
1/3/2011	10:54:10 PM	SiCl4 MFC set to  0.000000
1/3/2011	10:54:10 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:54:10 PM	Tube furnace set to 0
1/3/2011	10:54:10 PM	Run finished at 10:54 PM
1/3/2011	10:55:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2011	10:55:32 PM	Recipe started at 10:55 PM
1/3/2011	10:55:32 PM	Helium valve closed
1/3/2011	10:55:32 PM	H2 valve closed
1/3/2011	10:55:32 PM	BCl3 valve closed
1/3/2011	10:55:32 PM	PH3 valve closed
1/3/2011	10:55:32 PM	SiCl4 pre valve closed
1/3/2011	10:55:32 PM	SiCl4 post valve closed
1/3/2011	10:55:32 PM	Main Vac valve closed
1/3/2011	10:55:32 PM	Bubbler valve closed
1/3/2011	10:55:32 PM	Bypass valve opened
1/3/2011	10:55:32 PM	Helium MFC set to  0.000000
1/3/2011	10:55:32 PM	H2 MFC set to  0.000000
1/3/2011	10:55:32 PM	BCl3 MFC set to  0.000000
1/3/2011	10:55:32 PM	PHl3 MFC set to  0.000000
1/3/2011	10:55:32 PM	SiCl4 MFC set to  0.000000
1/3/2011	10:55:32 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:55:32 PM	Tube furnace set to 0
1/3/2011	10:56:29 PM	Helium valve closed
1/3/2011	10:56:29 PM	H2 valve closed
1/3/2011	10:56:29 PM	BCl3 valve closed
1/3/2011	10:56:29 PM	PH3 valve closed
1/3/2011	10:56:29 PM	SiCl4 pre valve closed
1/3/2011	10:56:29 PM	SiCl4 post valve closed
1/3/2011	10:56:29 PM	Bubbler valve closed
1/3/2011	10:56:29 PM	Main Vac valve opened
1/3/2011	10:56:29 PM	Bypass valve opened
1/3/2011	10:56:29 PM	Helium MFC set to  0.000000
1/3/2011	10:56:29 PM	H2 MFC set to  0.000000
1/3/2011	10:56:29 PM	BCl3 MFC set to  0.000000
1/3/2011	10:56:29 PM	PHl3 MFC set to  0.000000
1/3/2011	10:56:29 PM	SiCl4 MFC set to  0.000000
1/3/2011	10:56:29 PM	Bypass solenoid MFC set to  0.000000
1/3/2011	10:56:29 PM	Tube furnace set to 0
1/3/2011	10:56:30 PM	Run finished at 10:56 PM
1/3/2011	10:56:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
